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Effect of ITO Target Density (e.g., ≥99% Theoretical Density) on Film Uniformity and Conductivity, and Methods for Assessing Its Densification

Abstract The densification level of indium tin oxide (ITO) targets (≥99% theoretical density) significantly influences the uniformity and electrical conductivity of sputtered films. High-density targets (7.1–7.2 g/cm³) reduce particle spattering during sputtering, improving film thickness uniformity (±3%) by 2.7 times…

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