Process optimization plan for ITO target material and substrate welding when pores appear

Optimization solutions for ITO target material and substrate welding porosity issues include: 1) Plasma cleaning (Ar/O₂ = 4:1, 300W) to remove surface oxides (O content reduced by 85%); 2) Gradient heating welding (200°C → 450°C stepwise holding, total duration 60…





